02600nam 2200637Ia 450 991046108150332120200520144314.00-8155-1988-597866125411480-08-094772-71-282-54114-5(CKB)3710000000469719(EBL)534865(OCoLC)667288128(SSID)ssj0000419278(PQKBManifestationID)11251997(PQKBTitleCode)TC0000419278(PQKBWorkID)10384015(PQKB)11690322(MiAaPQ)EBC534865(CaSebORM)9780815515944(Au-PeEL)EBL534865(CaPaEBR)ebr10378866(EXLCZ)99371000000046971920090710d2010 uy 0engur|n|---|||||txtccrHandbook of silicon based MEMS materials and technologies[electronic resource] /Veikko Lindroos ... [et al.]1st ed.Amsterdam ;Boston William Andrew/Elsevier20101 online resource (669 p.)Micro & nano technologiesDescription based upon print version of record.0-8155-1594-4 Includes bibliographical references and index.A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS materialMaterial properties and measurement techniquesAnalytical methods used in materials characterizationModeling in MEMSMeasuring MEMSMicromachining technologies in MEMSEncapsulation of MEMS componentsEmerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as wellMicro & nano technologies.Microelectromechanical systemsMicroelectromechanical systemsMaterialsSiliconElectric propertiesElectronic books.Microelectromechanical systems.Microelectromechanical systemsMaterials.SiliconElectric properties.621.38152Lindroos Veikko934870MiAaPQMiAaPQMiAaPQBOOK9910461081503321Handbook of silicon based MEMS materials and technologies2105284UNINA