02211nam 2200613 450 991045010190332120200520144314.01-58053-873-8(CKB)1000000000210007(EBL)231651(OCoLC)70733931(SSID)ssj0000201171(PQKBManifestationID)11190123(PQKBTitleCode)TC0000201171(PQKBWorkID)10231402(PQKB)11206711(MiAaPQ)EBC231651(Au-PeEL)EBL231651(CaPaEBR)ebr10081990(OCoLC)55895606(CaBNVSL)mat09100080(IEEE)9100080(EXLCZ)99100000000021000720200729d2004 uy engur|n|---|||||txtccrMEMS mechanical sensors /Stephen Beeby [and others]Boston :Artech House,©2004.[Piscataqay, New Jersey] :IEEE Xplore,[2004]1 online resource (280 p.)Artech House microelectromechanical systems (MEMS) seriesDescription based upon print version of record.1-58053-536-4 Includes bibliographical references and index.Machine generated contents note: Ch. 1 Introduction -- Ch. 2 Materials and fabrication techniques -- Ch. 3 MEMS simulation and design tools -- Ch. 4 Mechanical sensor packaging -- Ch. 5AnnotationEngineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.Microelectromechanical systems series.Microelectromechanical systemsDetectorsElectronic books.Microelectromechanical systems.Detectors.681/.2Beeby Stephen906474CaBNVSLCaBNVSLCaBNVSLBOOK9910450101903321MEMS mechanical sensors2183313UNINA