04559nam 2201177z- 450 991036774280332120231214133201.03-03921-635-X(CKB)4100000010106289(oapen)https://directory.doabooks.org/handle/20.500.12854/53149(EXLCZ)99410000001010628920202102d2019 |y 0engurmn|---annantxtrdacontentcrdamediacrrdacarrierMEMS/NEMS Sensors: Fabrication and ApplicationMDPI - Multidisciplinary Digital Publishing Institute20191 electronic resource (242 p.)3-03921-634-1 Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors. Despite a long history of development, fabrication of novel MEMS/NEMS devices still poses unique challenges due to their requirement for a suspended geometry; and many new fabrication techniques have been proposed to overcome these challenges. However, further development of these techniques is still necessary, as newer materials such as compound semiconductors, and 2-dimensional materials are finding their way in various MEMS/NEMS applications, with more complex structures and potentially smaller dimensions.MEMS/NEMS Sensorsvibrating ring gyroscopetunnel magnetoresistive effectoptical sensormicro-NIR spectrometerpulse inertia forcegas sensorwet etchingoil detectionglass weldingspring designpower consumptionMEMS (micro-electro-mechanical system)back cavitydeflection position detectormagneticMEMSsingle-layer SiO2frequency tuningthreshold accuracysuspended micro hotplateAlGaN/GaN circular HFETsquadrature modulation signalinertial switchnanoparticle sensorlow noisephotonic crystal nanobeam cavityfloating sluginfrared imagebackstepping approachmicrodropletacceleration switchmicrogyroscopetemperature uniformitymethanemicrofluidicaccelerometer designphotonic crystal cavityanisotropyresonant frequencydual-mass MEMS gyroscopeanalytical modelsingle crystal silicontemperature sensormicro fluidicrefractive index sensormicrowave measurementlow zero-g offsetfemtosecond lasermicropellistorrapid fabricationaccelerometertracking performanceGaN diaphragmmicroactuatorresistance parameteroptomechanical sensorscanning grating mirrorGaAs MMICadaptive controlfrequency splitfrequency mismatchelectrostatic force feedbackthermoelectric power sensorsqueeze-film dampingsiliconwidebandAccelerometer readoutbonding strengthhigh temperature pressure sensors3D simulationlevel-set methodtetramethylammonium hydroxide (TMAH)Koley Goutamauth1323722Jahangir IfatauthBOOK9910367742803321MEMS3035773UNINA