04712nam 2201225z- 450 9910367742803321202102113-03921-635-X(CKB)4100000010106289(oapen)https://directory.doabooks.org/handle/20.500.12854/53149(oapen)doab53149(EXLCZ)99410000001010628920202102d2019 |y 0engurmn|---annantxtrdacontentcrdamediacrrdacarrierMEMS/NEMS Sensors: Fabrication and ApplicationMDPI - Multidisciplinary Digital Publishing Institute20191 online resource (242 p.)3-03921-634-1 Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors. Despite a long history of development, fabrication of novel MEMS/NEMS devices still poses unique challenges due to their requirement for a suspended geometry; and many new fabrication techniques have been proposed to overcome these challenges. However, further development of these techniques is still necessary, as newer materials such as compound semiconductors, and 2-dimensional materials are finding their way in various MEMS/NEMS applications, with more complex structures and potentially smaller dimensions.MEMS/NEMS SensorsHistory of engineering and technologybicssc3D simulationacceleration switchaccelerometeraccelerometer designAccelerometer readoutadaptive controlAlGaN/GaN circular HFETsanalytical modelanisotropyback cavitybackstepping approachbonding strengthdeflection position detectordual-mass MEMS gyroscopeelectrostatic force feedbackfemtosecond laserfloating slugfrequency mismatchfrequency splitfrequency tuningGaAs MMICGaN diaphragmgas sensorglass weldinghigh temperature pressure sensorsinertial switchinfrared imagelevel-set methodlow noiselow zero-g offsetmagneticMEMSMEMS (micro-electro-mechanical system)methanemicro fluidicmicro-NIR spectrometermicroactuatormicrodropletmicrofluidicmicrogyroscopemicropellistormicrowave measurementn/ananoparticle sensoroil detectionoptical sensoroptomechanical sensorphotonic crystal cavityphotonic crystal nanobeam cavitypower consumptionpulse inertia forcequadrature modulation signalrapid fabricationrefractive index sensorresistance parameterresonant frequencyscanning grating mirrorsiliconsingle crystal siliconsingle-layer SiO2spring designsqueeze-film dampingsuspended micro hotplatetemperature sensortemperature uniformitytetramethylammonium hydroxide (TMAH)thermoelectric power sensorthreshold accuracytracking performancetunnel magnetoresistive effectvibrating ring gyroscopewet etchingwidebandHistory of engineering and technologyKoley Goutamauth1323722Jahangir IfatauthBOOK9910367742803321MEMS3035773UNINA