04324nam 22010333a 450 991034684000332120250203235429.09783039210695303921069610.3390/books978-3-03921-069-5(CKB)4920000000095240(oapen)https://directory.doabooks.org/handle/20.500.12854/44945(ScCtBLL)ac724d8e-b20a-4258-8bfc-177bf169be92(OCoLC)1126113289(oapen)doab44945(EXLCZ)99492000000009524020250203i20192019 uu engurmn|---annantxtrdacontentcrdamediacrrdacarrierDevelopment of CMOS-MEMS/NEMS DevicesJaume Verd, Jaume SeguraMDPI - Multidisciplinary Digital Publishing Institute2019Basel, Switzerland :MDPI,2019.1 electronic resource (165 p.)9783039210688 3039210688 Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and M/NEMS dies can be combined in the same package (SiP), or integrated within a single chip (SoC). In the SoC approach the M/NEMS devices are monolithically integrated together with CMOS circuitry allowing the development of compact and low-cost CMOS-M/NEMS devices for multiple applications (physical sensors, chemical sensors, biosensors, actuators, energy actuators, filters, mechanical relays, and others). On-chip CMOS electronics integration can overcome limitations related to the extremely low-level signals in sub-micrometer and nanometer scale electromechanical transducers enabling novel breakthrough applications. This Special Issue aims to gather high quality research contributions dealing with MEMS and NEMS devices monolithically integrated with CMOS, independently of the final application and fabrication approach adopted (MEMS-first, interleaved MEMS, MEMS-last or others).]History of engineering and technologybicsscencapsulationNEM memory switchmagnetotransistorgas sensornano-system arraymetal oxide (MOX) sensorcapacitive pressure sensorreal-time temperature compensation loopmechanical relayssingle-crystal silicon (SC-Si)MEMS relaysMEMSoscillatormicro-electro-mechanical system (MEMS)uncooled IR-bolometermicroelectromechanical systemsmicrobolometerprogrammable sustaining amplifiermicro sensorCMOS-MEMSpierce oscillatorMEMS resonatorsmicro/nanoelectromechanical systems (MEMS/NEMS)resonatormicrohotplateNEMSapplication-specific integrated circuit (ASIC)MEMS modellingmagnetic fieldchopper instrumentation amplifiermicroresonatorsinterface circuitHall effectthermal detectortemperature sensorinfrared sensorCMOS-NEMSCMOSatomic force microscopeMEMS switchesstentmicro-electro-mechanical systems (MEMS) sensorsnano resonatorsilicon-on-insulator (SOI)MEMS-ASIC integrationSigma-DeltaMEMS characterizationhigh-Q capacitive accelerometermass sensorsM3DHistory of engineering and technologyVerd Jaume1287817Segura JaumeScCtBLLScCtBLLBOOK9910346840003321Development of CMOS-MEMS3020442UNINA