04366nam 22007935 450 991033787580332120200703144339.03-030-23299-910.1007/978-3-030-23299-3(CKB)4100000008780970(MiAaPQ)EBC5841323(DE-He213)978-3-030-23299-3(PPN)238488837(EXLCZ)99410000000878097020190727d2019 u| 0engurcnu||||||||txtrdacontentcrdamediacrrdacarrierFlash Lamp Annealing From Basics to Applications /by Lars Rebohle, Slawomir Prucnal, Denise Reichel1st ed. 2019.Cham :Springer International Publishing :Imprint: Springer,2019.1 online resource (xviii, 288 pages)Springer Series in Materials Science,0933-033X ;2883-030-23298-0 Includes bibliographical references and index.Introduction -- Technological background -- Basic components -- Flash lamps -- Process management and process control -- FLA assisted deposition -- Temperature -- Thermal budget -- Temperature measurements -- Temperature simulations -- FLA for semiconductors -- Defect engineering -- Doping -- Crystallization -- Semiconductor nanostructures -- Beyond semiconductors -- Transparent conducting oxides -- Metallic films -- High-k materials and dielectrics -- Flexible substrates -- Outlook.This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.Springer Series in Materials Science,0933-033X ;288SemiconductorsOptical materialsElectronic materialsManufacturesLasersPhotonicsMicrowavesOptical engineeringNanotechnologySemiconductorshttps://scigraph.springernature.com/ontologies/product-market-codes/P25150Optical and Electronic Materialshttps://scigraph.springernature.com/ontologies/product-market-codes/Z12000Manufacturing, Machines, Tools, Processeshttps://scigraph.springernature.com/ontologies/product-market-codes/T22050Optics, Lasers, Photonics, Optical Deviceshttps://scigraph.springernature.com/ontologies/product-market-codes/P31030Microwaves, RF and Optical Engineeringhttps://scigraph.springernature.com/ontologies/product-market-codes/T24019Nanotechnology and Microengineeringhttps://scigraph.springernature.com/ontologies/product-market-codes/T18000Semiconductors.Optical materials.Electronic materials.Manufactures.Lasers.Photonics.Microwaves.Optical engineering.Nanotechnology.Semiconductors.Optical and Electronic Materials.Manufacturing, Machines, Tools, Processes.Optics, Lasers, Photonics, Optical Devices.Microwaves, RF and Optical Engineering.Nanotechnology and Microengineering.621.38152620.11Rebohle Larsauthttp://id.loc.gov/vocabulary/relators/aut837191Prucnal Slawomirauthttp://id.loc.gov/vocabulary/relators/autReichel Deniseauthttp://id.loc.gov/vocabulary/relators/autBOOK9910337875803321Flash Lamp Annealing2517318UNINA