01203nam 2200361 450 991033252270332120230808204317.01-5090-1035-1(CKB)4100000008867490(WaSeSS)IndRDA00120885(EXLCZ)99410000000886749020200414d2016 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrier2016 International Conference on Optical MEMS and Nanophotonics 31 July-4 August 2016, Singapore /IEEE Photonics SocietyPiscataway, New Jersey :Institute of Electrical and Electronics Engineers,2016.1 online resource (143 pages)1-5090-1036-X Microelectromechanical systemsCongressesNanophotonicsCongressesMicroelectromechanical systemsNanophotonics621.381IEEE Photonics Society,WaSeSSWaSeSSPROCEEDING99103325227033212016 International Conference on Optical MEMS and Nanophotonics2500061UNINA