01551nas 2200541- 450 991033074040332120240130213016.02590-0072(OCoLC)1082523444(CKB)4100000007106616(CONSER)--2024204002(DE-599)ZDB2965612-6(EXLCZ)99410000000710661620190117a20189999 --- aengur|||||||||||txtrdacontentcrdamediacrrdacarrierMicro and nano engineering[Amsterdam] :Elsevier B.V.,2018-online resourceRefereed/Peer-reviewedMNEMicrotechnologyPeriodicalsNanotechnologyPeriodicalsMicrotechnologiePériodiquesNanotechnologiePériodiquesMicrotechnologyfastNanotechnologyfastPeriodical.periodicals.aatPeriodicalsfastZeitschrift.gnd-contentPeriodicals.lcgftPériodiques.rvmgfMicrotechnologyNanotechnologyMicrotechnologieNanotechnologieMicrotechnologyNanotechnology620International Micro and Nano Engineering Society,JOURNAL9910330740403321Micro and nano engineering1892722UNINA