01155nam 2200385 450 991031780580332120221021165542.01-83881-522-81-78923-395-X(CKB)4970000000100026(NjHacI)994970000000100026(EXLCZ)99497000000010002620221021d2018 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrierMEMS sensors design and application /Siva Yellampalli, editor[Place of publication not identified] :IntechOpen,[2018]©20181 online resource (218 pages) illustrations1-78923-394-1 Includes bibliographical references.MEMS sensors Microelectromechanical systems industryMicroelectromechanical systems industry.338.47620106Yellampalli SivaNjHacINjHaclBOOK9910317805803321MEMS sensors2959129UNINA