02256nam 2200433 450 991031776270332120231214145420.01-83962-063-31-78985-296-X(CKB)4970000000100456(iGPub)INOP0000591(oapen)https://directory.doabooks.org/handle/20.500.12854/54876(EXLCZ)99497000000010045620200217019 xx c0 0engurcn||||m|||atxtrdacontentcrdamediacrrdacarrierNovel metal electrodeposition and the recent applicationIntechOpen2019[Place of publication not identified] :IntechOpen,2019.©20191 online resource (172 pages)1-78985-295-1 Gold and noble metals have been attractive to humans from ancient times because of their beautiful features. In modern society, noble metals, especially gold, play important roles as components in electronic devices because of their high electrical conductivity, chemical stability, and density. In the field of MEMS devices, the demand for continuous miniaturization and sensitivity enhancement is always high. Especially for MEMS accelerometers, sensitivity is affected by Brownian noise, and components with sufficient mass are needed to suppress this noise. Therefore, it is difficult to reduce the dimensions of components to allow further miniaturization of the device. This book presents recent progress in noble metal electrodeposition and applications of gold-based materials in the realization of highly sensitive CMOS-MEMS accelerometers.TECHNOLOGY & ENGINEERING / Materials Science / Metals & AlloysbisacshPhysical SciencesEngineering and TechnologyMaterials ScienceMetals and NonmetalsTECHNOLOGY & ENGINEERING / Materials Science / Metals & Alloys.Masato Soneauth1303470Sone MasatoMasu KazuyaBOOK9910317762703321Novel metal electrodeposition and the recent application3027085UNINA