01353nam 2200385 450 991030515690332120230814230832.01-5386-1016-7(CKB)4100000007451914(WaSeSS)IndRDA00121871(EXLCZ)99410000000745191420200414d2018 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrier2018 IEEE 13th Nanotechnology Materials and Devices Conference 14-17 October 2018, Portland, OR, USA /Institute of Electrical and Electronics EngineersPiscataway, New Jersey :Institute of Electrical and Electronics Engineers,2018.1 online resource (123 pages)1-5386-1017-5 Nanostructured materialsCongressesNanotechnologyCongressesNanoelectromechanical systemsCongressesNanostructured materialsNanotechnologyNanoelectromechanical systems620.11Institute of Electrical and Electronics Engineers,WaSeSSWaSeSSPROCEEDING99103051569033212018 IEEE 13th Nanotechnology Materials and Devices Conference2511071UNINA