01058nas 2200373-a 450 991030463010332120180406071904.51880-9413(OCoLC)10468028(CKB)958480266874(CONSER)sn-84001202-(DE-599)ZDB2397282-8(EXLCZ)9995848026687419840228b1958201u --r djpn真空 [[シンクウ]]Tōkyō-to Nihon Shinkū Kyōkai0559-8516 SHINKUSHINKU J VAC SOC JPNJOURNAL OF THE VACUUM SOCIETY OF JAPANSHINKUUJournal of the Vacuum Society of JapanShinkūVacuum technologyPeriodicalsVacuum technologyfast(OCoLC)fst01163626Periodicals.fastVacuum technologyVacuum technology.Nihon Shinkū Kyōkai.JOURNAL9910304630103321真空3002586UNINA