00936nas 2200313-a 450 991030453900332120180406071904.51882-4749(OCoLC)10468028(CKB)1000000000390045(CONSER)sn-84001202-(EXLCZ)99100000000039004519840228b1958201u --r djpnJournal of the Vacuum Society of JapanTōkyō-to Nihon Shinkū Kyōkai1882-2398 Journal of the Vacuum Society of JapanShinkūVacuum technologyPeriodicalsVacuum technologyfast(OCoLC)fst01163626Periodicals.fastVacuum technologyVacuum technology.Nihon Shinkū Kyōkai.JOURNAL9910304539003321Journal of the Vacuum Society of Japan2104706UNINA