03752nam 22006975 450 991029993230332120230128074425.0981-10-5945-410.1007/978-981-10-5945-2(CKB)4100000003359703(DE-He213)978-981-10-5945-2(MiAaPQ)EBC6312000(MiAaPQ)EBC5579335(Au-PeEL)EBL5579335(OCoLC)1032005527(PPN)258871571(PPN)226694666(EXLCZ)99410000000335970320180419d2018 u| 0engurnn#008mamaatxtrdacontentcrdamediacrrdacarrierMicro Electro Mechanical Systems /edited by Qing-An Huang1st ed. 2018.Singapore :Springer Nature Singapore :Imprint: Springer,2018.1 online resource (1122 illus., 876 illus. in color. eReference.)Micro/Nano Technologies,2522-5073981-10-5944-6 Includes bibliographical references and index.Device Physics -- Scaling effect -- Sensors -- Actuators -- RF MEMS -- Micro fluid and bio MEMS -- Integration techniques -- Micro systems.This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, postgraduates, researchers, scientists, and field experts. This comprehensive summary will provide a solid knowledge background and inspire innovations in this highly interdisciplinary field. The handbook series consists of 5 volumes: Micro/nano fabrication technology, MEMS, Nanomaterial, Nanomedicine and Applications of micro-/nanotechnologies in IT. Experienced researchers and experts are invited to contribute in each of these areas.The series is published under Springer Major Reference works, which allows continuous online update and publication. These features allow newcomers and other readers to keep in touch with the most up-to-date information in micro-/nanotechnologies.It presents an overview of the knowledge base, as well as selected topics and provides comprehensive and authoritative information on the field for researchers, engineers, scientists and graduate students who are involved in different aspects of micro-/nanotechnologies.This publication will provide inspiration for innovative research and application ideas for continued growth of the field.Micro/Nano Technologies,2522-5073MechatronicsMicrotechnologyMicroelectromechanical systemsElectronicsTelecommunicationMechatronicsMicrosystems and MEMSElectronics and Microelectronics, InstrumentationMicrowaves, RF Engineering and Optical CommunicationsMechatronics.Microtechnology.Microelectromechanical systems.Electronics.Telecommunication.Mechatronics.Microsystems and MEMS.Electronics and Microelectronics, Instrumentation.Microwaves, RF Engineering and Optical Communications.621.381Huang Qing-Anedthttp://id.loc.gov/vocabulary/relators/edtMiAaPQMiAaPQMiAaPQBOOK9910299932303321Micro Electro Mechanical Systems2504048UNINA