03434nam 22007335 450 991029859920332120200629162156.03-319-76294-X10.1007/978-3-319-76294-4(CKB)4100000002892454(DE-He213)978-3-319-76294-4(MiAaPQ)EBC5327236(PPN)225551063(EXLCZ)99410000000289245420180320d2018 u| 0engurnn|008mamaatxtrdacontentcrdamediacrrdacarrierPhysical Design and Mask Synthesis for Directed Self-Assembly Lithography /by Seongbo Shim, Youngsoo Shin1st ed. 2018.Cham :Springer International Publishing :Imprint: Springer,2018.1 online resource (XIV, 138 p. 92 illus., 54 illus. in color.) NanoScience and Technology,1434-49043-319-76293-1 Introduction -- DSAL Manufacturability -- Placement Optimization for DSAL -- Placement Optimization for MP-DSAL Compliant Layout -- Redundant Via Insertion for DSAL.This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.NanoScience and Technology,1434-4904NanotechnologyElectronic circuitsOptical materialsElectronicsMaterialsNanoscienceNanoscienceNanostructuresSemiconductorsNanotechnologyhttps://scigraph.springernature.com/ontologies/product-market-codes/Z14000Nanotechnology and Microengineeringhttps://scigraph.springernature.com/ontologies/product-market-codes/T18000Circuits and Systemshttps://scigraph.springernature.com/ontologies/product-market-codes/T24068Optical and Electronic Materialshttps://scigraph.springernature.com/ontologies/product-market-codes/Z12000Nanoscale Science and Technologyhttps://scigraph.springernature.com/ontologies/product-market-codes/P25140Semiconductorshttps://scigraph.springernature.com/ontologies/product-market-codes/P25150Nanotechnology.Electronic circuits.Optical materials.ElectronicsMaterials.Nanoscience.Nanoscience.Nanostructures.Semiconductors.Nanotechnology.Nanotechnology and Microengineering.Circuits and Systems.Optical and Electronic Materials.Nanoscale Science and Technology.Semiconductors.620.115Shim Seongboauthttp://id.loc.gov/vocabulary/relators/aut768316Shin Youngsooauthttp://id.loc.gov/vocabulary/relators/autBOOK9910298599203321Physical Design and Mask Synthesis for Directed Self-Assembly Lithography2505285UNINA