04037nam 22006975 450 991029859800332120251022201024.03-319-93925-410.1007/978-3-319-93925-4(CKB)4100000005679185(DE-He213)978-3-319-93925-4(MiAaPQ)EBC5493425(PPN)229915027(EXLCZ)99410000000567918520180813d2018 u| 0engurnn#008mamaatxtrdacontentcrdamediacrrdacarrierMetal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact /by Cor Claeys, Eddy Simoen1st ed. 2018.Cham :Springer International Publishing :Imprint: Springer,2018.1 online resource (XXXIII, 438 p. 215 illus., 207 illus. in color.)Springer Series in Materials Science,0933-033X ;2703-319-93924-6 Preface -- Introduction -- Basic Properties of Metals in Semiconductors -- Sources of Metals in Si and Ge Processing -- Characterization and Detection of Metals in Silicon and Germanium -- Electrical Activity of Metals in Si and Ge -- Impact of Metals on Silicon Devices and Circuits -- Gettering and Passivation of Metals in Silicon and Germanium -- Modeling and Simulation of Metals in Silicon and Germanium -- Conclusions.This book gives a unique review of different aspects of metallic contaminations in Si and Ge-based semiconductors. All important metals are discussed including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on the electrical device performance. Several control and possible gettering approaches are addressed. The book is a reference for researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. It has an interdisciplinary nature by combining different disciplines such as material science, defect engineering, device processing, defect and device characterization and device physics and engineering.Springer Series in Materials Science,0933-033X ;270Optical materialsElectronicsMaterialsMicrowavesOptical engineeringSemiconductorsElectronic circuitsMaterials scienceOptical and Electronic Materialshttps://scigraph.springernature.com/ontologies/product-market-codes/Z12000Microwaves, RF and Optical Engineeringhttps://scigraph.springernature.com/ontologies/product-market-codes/T24019Semiconductorshttps://scigraph.springernature.com/ontologies/product-market-codes/P25150Electronic Circuits and Deviceshttps://scigraph.springernature.com/ontologies/product-market-codes/P31010Characterization and Evaluation of Materialshttps://scigraph.springernature.com/ontologies/product-market-codes/Z17000Optical materials.ElectronicsMaterials.Microwaves.Optical engineering.Semiconductors.Electronic circuits.Materials science.Optical and Electronic Materials.Microwaves, RF and Optical Engineering.Semiconductors.Electronic Circuits and Devices.Characterization and Evaluation of Materials.620.11295620.11297Claeys Cor Lauthttp://id.loc.gov/vocabulary/relators/aut1851648Simoen E(Eddy),authttp://id.loc.gov/vocabulary/relators/autBOOK9910298598003321Metal Impurities in Silicon- and Germanium-Based Technologies4445818UNINA01177cam2 22003131 450 SOBE0008528720260112100405.020260112d1962 |||||ita|0103 baitaIT<<6: L'>>arte nel RinascimentoMilanoTouring Club Italiano1962208 p., [80] carte di tav.ill.28 cmtesti di Diego Valeri, Enzo Carli, Luigi Ambrosoli001E6002000540642001 Conosci l'Italia / Cesare Chiodi<<L'>>arte nel RinascimentoSOBA00036538936377Valeri, DiegoAF00006311070Carli, Enzo <1910-1999>SOBA00034139070Ambrosoli, Luigi <1919-2002>SOBA00036539070*Touring *club *italianoA600200039603070ITUNISOB20260112RICAUNISOBUNISOBFondo|Calì184599SOBE00085287M 102 Monografia moderna SBNMFondo|Calì002079SI18459920260626CaliDonoNrovitoUNISOBUNISOB20260112100042.020260112100120.0rovitoArte nel Rinascimento936377UNISOB