01483nam 2200385 450 991029565590332120230814230144.01-5386-6790-8(CKB)4100000007167339(WaSeSS)IndRDA00122732(EXLCZ)99410000000716733920200508d2018 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrier2018 International Conference on Simulation of Semiconductor Processes and Devices 24-26 September 2018, Austin, TX, USA /Institute of Electrical and Electronics EngineersPiscataway, New Jersey :Institute of Electrical and Electronics Engineers,2018.1 online resource (61 pages)1-5386-6791-6 SemiconductorsMathematical modelsCongressesSemiconductorsDesign and constructionCongressesSemiconductorsSimulation methodsCongressesSemiconductorsMathematical modelsSemiconductorsDesign and constructionSemiconductorsSimulation methods621.38152015118Institute of Electrical and Electronics Engineers,WaSeSSWaSeSSPROCEEDING99102956559033212018 International Conference on Simulation of Semiconductor Processes and Devices2530314UNINA