01204oam 2200397zu 450 991016475460332120210807002122.00-8031-5963-3(CKB)3170000000044642(SSID)ssj0001490220(PQKBManifestationID)11836941(PQKBTitleCode)TC0001490220(PQKBWorkID)11473704(PQKB)10052514(NjHacI)993170000000044642(EXLCZ)99317000000004464220160829d1961 uy engur|||||||||||txtccrMaterials and Electron Device Processing[Place of publication not identified]American Society for Testing & Materials19611 online resource (viii, 238 pages)Bibliographic Level Mode of Issuance: Monograph0-8031-6117-4 ElectronicsMaterialsElectronicsMaterials.512.10246213Standing S946511PQKBBOOK9910164754603321Materials and Electron Device Processing2138381UNINA