01194oam 2200421zu 450 991016471560332120210807002157.00-8031-4871-2(CKB)3170000000045200(SSID)ssj0001490463(PQKBManifestationID)11927200(PQKBTitleCode)TC0001490463(PQKBWorkID)11476773(PQKB)10040518(NjHacI)993170000000045200(EXLCZ)99317000000004520020160829d1983 uy engur|||||||||||txtccrSilicon Processing[Place of publication not identified]American Society for Testing & Materials19831 online resource (559 pages)Bibliographic Level Mode of Issuance: Monograph0-8031-0243-7 Crystal growthMetal crystalsCrystal growth.Metal crystals.548.5Gupta D. C863878PQKBBOOK9910164715603321Silicon Processing1928457UNINA