01795oam 2200505zu 450 991016469210332120210807002121.00-8031-5021-0(CKB)3170000000045370(SSID)ssj0001184203(PQKBManifestationID)11755583(PQKBTitleCode)TC0001184203(PQKBWorkID)11196475(PQKB)10898042(EXLCZ)99317000000004537020160829d1987 uy engtxtccrEmerging semiconductor technology : a symposium[Place of publication not identified]American Society for Testing and Materials1987ASTM special technical publication Emerging semiconductor technology Bibliographic Level Mode of Issuance: Monograph0-8031-0459-6 Semiconductor industryCongressesSemiconductorsDesign and constructionCongressesElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCElectrical EngineeringHILCCSemiconductor industryCongressesSemiconductorsDesign and constructionCongressesElectrical & Computer EngineeringEngineering & Applied SciencesElectrical Engineering621.3815/2Langer Paul HGupta D. CASTM Committee F-1 on ElectronicsSymposium on Semiconductor Processing(4th :1986 :San Jose, Calif.)PQKBBOOK9910164692103321Emerging semiconductor technology : a symposium1968158UNINA