01703oam 2200493zu 450 991016468890332120210807002136.00-8031-5107-1(CKB)3170000000045402(SSID)ssj0001184371(PQKBManifestationID)11771236(PQKBTitleCode)TC0001184371(PQKBWorkID)11191630(PQKB)11513523(EXLCZ)99317000000004540220160829d1989 uy engtxtccrSemiconductor fabrication : technology and metrology[Place of publication not identified]ASTM1989STP Semiconductor fabrication Bibliographic Level Mode of Issuance: Monograph0-8031-1273-4 Semiconductor FabricationSemiconductorsCongressesDesign and constructionElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCElectrical EngineeringHILCCSemiconductorsCongressesDesign and constructionElectrical & Computer EngineeringEngineering & Applied SciencesElectrical Engineering621.381/52Gupta D. CSemiconductor Equipment and Materials InstituteASTM Committee F-1 on ElectronicsSymposium on Semiconductor Processing(5th :1988 :Santa Clara, Calif.)PQKBBOOK9910164688903321Semiconductor fabrication : technology and metrology2205702UNINA