01506oam 2200445zu 450 991016428500332120210807002217.00-8031-5431-3(CKB)3170000000044338(SSID)ssj0001489998(PQKBManifestationID)11826024(PQKBTitleCode)TC0001489998(PQKBWorkID)11458872(PQKB)10730280(EXLCZ)99317000000004433820160829d2000 uy engtxtccrGate Dielectric Integrity: Material, Process, and Tool Qualification[Place of publication not identified]American Society for Testing & Materials2000Bibliographic Level Mode of Issuance: Monograph0-8031-2615-8 Gate Dielectric IntegrityElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCElectrical EngineeringHILCCElectrical & Computer EngineeringEngineering & Applied SciencesElectrical Engineering621.3815/2Gupta D. C863878Brown George AConference on Gate Dielectric Integrity(1999 :San Jose, Calif.)PQKBBOOK9910164285003321Gate Dielectric Integrity: Material, Process, and Tool Qualification1960875UNINA