03513oas 2201309 a 450 991014732940332120251106213014.01432-1858(DE-599)ZDB1476561-5(DE-599)1476561-5(OCoLC)43185385(CONSER) 00227308 (CKB)954925573922(EXLCZ)9995492557392220000106a19949999 sy engurcnu||||||||txtrdacontentcrdamediacrrdacarrierMicrosystem technologies sensors, actuators, systems integrationBerlin SpringerRefereed/Peer-reviewed0946-7076 Sensors, actuators, systems integrationMicro- and Nanosystems Information Storage and Processing SystemsMicroelectronicsPeriodicalsTransducersPeriodicalsActuatorsPeriodicalsNanotechnologyPeriodicalsInformation storage and retrieval systemsPeriodicalsMicroélectroniquePériodiquesTransducteursPériodiquesActionneursPériodiquesNanotechnologyfast(OCoLC)fst01032639Information storage and retrieval systemsfast(OCoLC)fst00972781Actuatorsfast(OCoLC)fst00796346Microelectronicsfast(OCoLC)fst01019757Transducersfast(OCoLC)fst01154575MikrosystemtechnikgndZeitschriftgndOnline-RessourcegndMicroelectrònicathubActuadorsthubTransductorsthubPeriodicals.fastPeriodicals.lcgftZeitschrift.swdOnline-Publikation.swdRevistes electròniques.thubMicroelectronicsTransducersActuatorsNanotechnologyInformation storage and retrieval systemsMicroélectroniqueTransducteursActionneursNanotechnology.Information storage and retrieval systems.Actuators.Microelectronics.Transducers.MikrosystemtechnikZeitschrift.Online-RessourceMicroelectrònica.Actuadors.Transductors.621.381VPIVPIEYMOCLCQMUQOCLMYGOCLCQUKMGBOCLCQOCLCFVT2OCLCQSHSGEBAYGBVCPAU@CCOPULW2UGWDNBDEBBGOCLCOOCLCQOCLCADLCOCLOCLCANJTUBYOCLCQOCLCOOCLCQUABSXBOCLCLOCLCAOCLCQJOURNAL9910147329403321Microsystem technologies2027648UNINA