01516oas 2200385z- 450 991014713870332120180209194330.01347-5525(CKB)111054751708008(EXLCZ)9911105475170800820170808cuuuuuuuu -u- -jpn電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） [[デンキガッカイロンブンシEセンサマイクロマシンブモンシ]]社団法人 電気学会Refereed/Peer-reviewed1341-8939 でんきがっかいろんぶんしEせんさまいくろましんぶもんしdenki gakkai ronbunshi E sensa maikuro mashin bumonshiIEEJ TRANSACTIONS ON SENSORS AND MICROMACHINESChemistryApplied ChemistryEngineeringElectronicsEngineeringInstrumentationPhysicsOptics & Opto ElectronicsPhysicsUltrasonicTelecommunications TechnologyGeneral and OthersChemistryApplied ChemistryEngineeringElectronicsEngineeringInstrumentationPhysicsOptics & Opto ElectronicsPhysicsUltrasonicTelecommunications TechnologyGeneral and OthersJOURNAL9910147138703321電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）2244073UNINA