01289oam 2200409zu 450 991014682150332120241212215315.097815090987741509098771(CKB)1000000000022651(SSID)ssj0000453723(PQKBManifestationID)12167354(PQKBTitleCode)TC0000453723(PQKBWorkID)10498181(PQKB)10056238(NjHacI)991000000000022651(EXLCZ)99100000000002265120160829d2005 uy engur|||||||||||txtccr2005 IEEE International Symposium on Semiconductor Manufacturing[Place of publication not identified]I E E E20051 online resource (xvi, 498 pages) illustrationsBibliographic Level Mode of Issuance: Monograph9780780391437 0780391438 Computer integrated manufacturing systemsCongressesComputer integrated manufacturing systems670.285PQKBPROCEEDING99101468215033212005 IEEE International Symposium on Semiconductor Manufacturing2496041UNINA