01164oam 2200373zu 450 991014681940332120241212215316.097815090975001509097503(CKB)1000000000022719(SSID)ssj0000395976(PQKBManifestationID)12144192(PQKBTitleCode)TC0000395976(PQKBWorkID)10456890(PQKB)11113694(EXLCZ)99100000000002271920160829d2005 uy engtxtccrIEEE/LEOS Optical MEMs 2005 : International Conference on Optical MEMs and Their Applications : 1-4 August 2005, Holiday Club Eden, Oulu, Finland[Place of publication not identified]IEEE2005Bibliographic Level Mode of Issuance: Monograph9780780392786 0780392787 Optical MEMSCongressesOptical MEMSInternational Conference on Optical MEMs and Their ApplicationsPQKBPROCEEDING9910146819403321IEEE878179UNINA