02711oam 2200673 a 450 991014605830332120210108122808.01-280-55680-397866105568090-471-66878-80-470-35744-40-471-66879-6(CKB)1000000000019081(MH)009290247-2(SSID)ssj0000312178(PQKBManifestationID)11292027(PQKBTitleCode)TC0000312178(PQKBWorkID)10329495(PQKB)10964357(MiAaPQ)EBC4957837(Au-PeEL)EBL4957837(CaONFJC)MIL55680(OCoLC)85820356(EXLCZ)99100000000001908120030326d2003 uy 0engurcnu||||||||txtccrULSI semiconductor technology atlas /Chih-Hang Tung, George T.T. Sheng, Chih-Yuan Lu[electronic resource]Hoboken, NJ John Wileyc20031 online resource (xii, 666 p. )ill. ;Bibliographic Level Mode of Issuance: Monograph0-471-45772-8 Includes bibliographical references and index.Ultra Large Scale Integration (ULSI) refers to chips with more than 10,000,000 devices per chip. It is the natural outgrowth of VLSI (Very Large Scale Integration). ULSI Semiconductor Technology Atlas uses TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and associated problems.Integrated circuitsUltra large scale integrationAtlasesElectron microscopyElectrical EngineeringHILCCElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCElectronic booksIntegrated circuitsUltra large scale integrationElectron microscopy.Electrical EngineeringElectrical & Computer EngineeringEngineering & Applied Sciences621.39/5Tung Chih-Hang1963-921749Sheng George T. T921750Lu Chih-Yuan1950-921751DLCDLCBOOK9910146058303321ULSI semiconductor technology atlas2068016UNINAThis Record contains information from the Harvard Library Bibliographic Dataset, which is provided by the Harvard Library under its Bibliographic Dataset Use Terms and includes data made available by, among others the Library of Congress