01344oam 2200469zu 450 991014572350332120241212215707.09781509077892150907789897814244191801424419182(CKB)1000000000710926(SSID)ssj0000453436(PQKBManifestationID)12191006(PQKBTitleCode)TC0000453436(PQKBWorkID)10482448(PQKB)10943450(NjHacI)991000000000710926(EXLCZ)99100000000071092620160829d2008 uy engur|||||||||||txtccr2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics[Place of publication not identified]I E E E20081 online resourceBibliographic Level Mode of Issuance: Monograph9781424419173 1424419174 Microelectromechanical systemsCongressesNanophotonicsCongressesMicroelectromechanical systemsNanophotonics621.381IEEE StaffPQKBPROCEEDING99101457235033212008 IEEE2416956UNINA