01082nam 2200337 450 991014545150332120230831080728.01-5090-9298-6(CKB)1000000000278228(NjHacI)991000000000278228(EXLCZ)99100000000027822820230831d2006 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrierIEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006 /Institute of Electrical and Electronics Engineers[Place of publication not identified] :IEEE,2006.1 online resource (378 pages)0-7803-9562-X OPTICAL MEMS & THEIR APPLICATIONS CONFERENCE, 2006. IEEE/LEOS INTERNATIONAL CONFERENCE ONOptical MEMSOptical MEMS.621.36NjHacINjHaclPROCEEDING9910145451503321IEEE878179UNINA