01362oam 2200445zu 450 991014541390332120241212215621.09781424438167142443816097814244381501424438152(CKB)1000000000709916(SSID)ssj0000453007(PQKBManifestationID)12171159(PQKBTitleCode)TC0000453007(PQKBWorkID)10473233(PQKB)11729119(NjHacI)991000000000709916(EXLCZ)99100000000070991620160829d2009 uy engur|||||||||||txtccr2009 17th International Conference on Advanced Thermal Processing of Semiconductors[Place of publication not identified]I E E E20091 online resource (216 pages) illustrationsBibliographic Level Mode of Issuance: Monograph9781424438143 1424438144 Semiconductor dopingCongressesSemiconductor doping004.6IEEE StaffPQKBPROCEEDING99101454139033212009 17th International Conference on Advanced Thermal Processing of Semiconductors2501864UNINA