01317oam 2200445zu 450 991014513770332120241212215554.09781509087099150908709597814244065311424406536(CKB)1000000000695649(SSID)ssj0000453854(PQKBManifestationID)12164219(PQKBTitleCode)TC0000453854(PQKBWorkID)10486804(PQKB)10929934(EXLCZ)99100000000069564920160829d2007 uy engtxtccr2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference[Place of publication not identified]I E E E2007Bibliographic Level Mode of Issuance: Monograph9781424406524 1424406528 Electrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCElectrical EngineeringHILCCElectrical & Computer EngineeringEngineering & Applied SciencesElectrical EngineeringIEEE StaffPQKBPROCEEDING99101451377033212007 IEEE2346897UNINA