03404oas 2201153 a 450 991014456680332120251105213014.01520-8559(DE-599)ZDB1475424-1(DE-599)1475424-1(OCoLC)37329463(CONSER)sn 98004661 (CKB)954925535070(EXLCZ)9995492553507019970721a19839999 uy aengurcnu||||||||txtrdacontentcrdamediacrrdacarrierJournal of vacuum science & technologyAVacuum, surfaces, and filmsWoodbury, N.Y. Published for the American Vacuum Society by the American Institute of Physics[1983-]Refereed/Peer-reviewedTitle from PDF of issue table of contents (AIP, viewed Nov. 9, 2006).0734-2101 Journal of vacuum science and technology.Journal of vacuum science & technology.Vacuum, surfaces, and filmsJVST AJournal of vacuum science & technology.J. vac. sci. technol., A, Vac. surf. filmsVacuum technologyPeriodicalsSurfaces (Physics)PeriodicalsSurface chemistryPeriodicalsThin filmsPeriodicalsVide (Technologie)PériodiquesChimie des surfacesPériodiquesSurfaces (Physique)PériodiquesCouches mincesPériodiquesSurface chemistryfast(OCoLC)fst01139210Surfaces (Physics)fast(OCoLC)fst01139265Thin filmsfast(OCoLC)fst01150018Vacuum technologyfast(OCoLC)fst01163626Vacuum technologyPeriodicalsnliSurfaces (Physics)PeriodicalsnliSurface chemistryPeriodicalsnliThin filmsPeriodicalsnliPeriodicals.Periodicals.fastPeriodicals.lcgftVacuum technologySurfaces (Physics)Surface chemistryThin filmsVide (Technologie)Chimie des surfacesSurfaces (Physique)Couches mincesSurface chemistry.Surfaces (Physics)Thin films.Vacuum technology.Vacuum technologySurfaces (Physics)Surface chemistryThin films621American Vacuum SocietyAmerican Institute of PhysicsGZMGZMOCLNSDOCLCQMUQTXAKSUCITOCLCQDLCOCLCQOCLCOOCLCFOCLCOOCLCQOCLCAAU@LIPSFBVT2VLYOCLCQAUDOCLCLOCLCQJOURNAL9910144566803321Journal of vacuum science & technology791404UNINA