01798oam 2200529zu 450 991014411650332120210721054705.01-281-84300-897866118430073-527-61674-83-527-61696-9(CKB)1000000000555819(SSID)ssj0000202224(PQKBManifestationID)11181297(PQKBTitleCode)TC0000202224(PQKBWorkID)10251773(PQKB)11584420(MiAaPQ)EBC1161985(EXLCZ)99100000000055581920160829d2006 uy engtxtccrMicro process engineering : fundamentals, devices, fabrication, and applications[Place of publication not identified]Wiley VCH2006Advanced micro & nanosystems Micro process engineering Bibliographic Level Mode of Issuance: Monograph3-527-31246-3 Production engineeringMicrotechnologyIndustrial & Management EngineeringHILCCMechanical EngineeringHILCCEngineering & Applied SciencesHILCCProduction engineeringMicrotechnologyIndustrial & Management EngineeringMechanical EngineeringEngineering & Applied Sciences670.42Kockmann Norbert; Brand, Oliver; Fedder , Gary K977626Kockmann NorbertPQKBBOOK9910144116503321Micro process engineering : fundamentals, devices, fabrication, and applications2227293UNINA