01707nam 2200565Ia 450 991014409630332120180914180902.01-281-94693-197866119469373-527-62213-63-527-62256-X(CKB)1000000000551372(EBL)3460105(SSID)ssj0000235367(PQKBManifestationID)11176146(PQKBTitleCode)TC0000235367(PQKBWorkID)10260862(PQKB)11121884(MiAaPQ)EBC3460105(EXLCZ)99100000000055137220080822d2008 uy 0engur|n|---|||||txtccrReliability of MEMS[electronic resource] /edited by Osamu Tabata and Toshiyuki Tsuchiya11th ed.Weinheim Wiley-VCHc20081 online resource (0 p.)Advanced micro & nanosystems ;v.6"Testing of materials and devices".3-527-31494-6 Includes bibliographical references and index.Advanced micro & nanosystems ;v.6.Microelectromechanical systemsReliabilityElectrical engineeringElectronic books.Microelectromechanical systemsReliability.Electrical engineering.615.7Tsuchiya Toshiyuki917771Tabata Osamu1956-892953MiAaPQMiAaPQMiAaPQBOOK9910144096303321Reliability of MEMS2057813UNINA