03780nam 2200601 a 450 991014370610332120170809164651.01-282-34620-297866123462000-470-01794-50-470-06541-9(CKB)1000000000357405(EBL)290997(OCoLC)476048340(SSID)ssj0000138763(PQKBManifestationID)11158392(PQKBTitleCode)TC0000138763(PQKBWorkID)10100704(PQKB)11779710(MiAaPQ)EBC290997(PPN)175354006(EXLCZ)99100000000035740520060918d2007 uy 0engur|n|---|||||txtccrDielectric films for advanced microelectronics[electronic resource] /edited by Mikhail Baklanov, Martin Green, and Karen MaexChichester, England ;Hoboken, NJ John Wiley & Sonsc20071 online resource (510 p.)Wiley series in materials for electronic and optoelectronic applicationsDescription based upon print version of record.0-470-01360-5 Includes bibliographical references and index.Low and ultralow dielectric constant films prepared by plasma-enhanced chemical vapor deposition /A. Grill --Spin-on dielectric materials /Geraud Dubois, Robert D. Miller, Willi Volksen --Positron annihilation spectroscopy /David W. Gidley, Hua-Gen Peng, Richard Vallery --Structure characterization of nanoporous interlevel dielectric thin films with x-ray and neutron radiation /Christopher L. Soles ... [et al.] --Ellipsometric porosimetry /Mikhail R. Baklanov --Mechanical and transport properties of low-k dielectrics /J. L. Plawsky ... [et al.] --Integration of low-k dielectric films in damascene processes /R. J. O. M. Hoofman ... [et al.] --ONO structures and oxynitrides in modern microelectronics : material science, characterization and application /Yakov Roizin, Vladimir Gritsenko --Material engineering of high-k gate dielectrics /Akira Toriumi, Koji Kita --Physical characterization of ultra-thin high-k dielectric /T. Conard, H. Bender, W. Vandervorst --Electrical characterization of advanced gate dielectrics /Robin Degraeve ... [et al.] --Integration issues of high-k gate dielectrics /Yasuo Nara --Anisotropic conductive film (ACF) for advanced microelectronic interconnects /Yi Li, C. P. Wong.The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are a few examples of the miniaturized device technologies that depend on the utilization of thin film materials. This book presents an in-depth overview of the novel developments madWiley series in materials for electronic and optoelectronic applications.Dielectric filmsMicroelectronicsMaterialsDielectric films.MicroelectronicsMaterials.621.381Baklanov Mikhail895636Green Martin151860Maex Karen895637MiAaPQMiAaPQMiAaPQBOOK9910143706103321Dielectric films for advanced microelectronics2000770UNINA02393nam0 2200445 i 450 IEI002571120231121125505.0IT816764 20010228d1979 ||||0itac50 baitaitz01i xxxe z01n˜Gli œarchivi italiani durante la seconda guerra mondialeElvira Gencarelli Roma\s.n.!1979VIII, 240 p.24 cmQuaderni della Rassegna degli archivi di Stato50001CFI00703342001 Quaderni della Rassegna degli archivi di Stato50Archivi di StatoDocumenti relativi alla guerra mondiale 1939-1945FIRRMLC410713IGuerra mondiale 1939-1945ItaliaFonti archivisticheFIRRMLC410714IArchiviItalia1943-1945FIRRMLC162856I940.5421Gencarelli, ElviraIEIV016070070465855ITIT-0120010228IT-RM0290 IT-RM0459 IT-RM0211 IT-RM0830 IT-RM0251 IT-RM0460 IT-RM1163 IT-RM0151 IT-RM1481 IT-FR0017 BIBLIOTECA ANGELICARM0290 ARCHIVIO DI STATO DI ROMARM0459 Fondazione Marco BessoRM0211 Biblioteca della Direzione Generale ArchiviRM0830 Biblioteca Della Soprintendenza Archivistica Per Il LazioRM0251 Biblioteca Dell' Archivio Centrale Dello StatoRM0460 Shttp://151.12.58.123/dgagaeta/pdf.php?file=Quaderni/52834ef2d678d.pdfIstituto Centrale Restauro Conservazione Patrimonio Archivistico LibrarioRM1163 SBiblioteca Istituto Storico Italiano Medio Evo - IRM0151 Biblioteca Della Società Dalmata Di Storia PatriaRM1481 Biblioteca umanistica Giorgio ApreaFR0017 NIEI0025711Biblioteca umanistica Giorgio Aprea 52MAG 4 Coll H 50 52MAG0000064525 VMB RS A 2020070920200709 06 12 14 20 24 27 36 41 43 52Archivi italiani durante la seconda guerra mondiale209608UNICAS