01334nam 2200373 450 991014304380332120230721025509.01-5090-8261-1(CKB)1000000000331357(WaSeSS)IndRDA00119537(EXLCZ)99100000000033135720200305d2007 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrier2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems 16-19 January 2007, Bangkok, Thailand /Institute of Electrical and Electronics EngineersPiscataway, New Jersey :Institute of Electrical and Electronics Engineers,2007.1 online resource (xvi, 1214 pages)1-4244-0609-9 1-4244-0610-2 Nanoelectromechanical systemsCongressesMicroelectromechanical systemsCongressesNanoelectromechanical systemsMicroelectromechanical systems620.5Institute of Electrical and Electronics Engineers,WaSeSSWaSeSSPROCEEDING99101430438033212007 2nd IEEE International Conference on Nano2509973UNINA