01438oam 2200385z- 450 991014302120332120241212215529.097815090821551509082158(CKB)1000000000331798(EXLCZ)99100000000033179820220614c2007uuuu -u- -eng15th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2007 October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy /IEEE Electron Devices SocietyIEEE9781424412273 1424412277 9781424412280 1424412285 2007 15th International Conference on Advanced Thermal Processing of SemiconductorsComputer and Automation Engineering SemiconductorsHeat treatmentCongressesRapid thermal processingCongressesSemiconductor dopingCongressesSemiconductorsDefectsCongressesSemiconductorsHeat treatmentRapid thermal processingSemiconductor dopingSemiconductorsDefects621.3815/2IEEE Electron Devices Society.PROCEEDING991014302120332115th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 20072871341UNINA