01635oam 2200505zu 450 991014299530332120241212215520.097815090827281509082727(CKB)1000000000331721(SSID)ssj0000395973(PQKBManifestationID)12102814(PQKBTitleCode)TC0000395973(PQKBWorkID)10460445(PQKB)10368374(EXLCZ)99100000000033172120160829d2007 uy engtxtccr2007 IEEE/IEOS International Conference on Optical MEMS and Nanophotonics : Hualien, Taiwan, 12-16 August, 2007[Place of publication not identified]IEEE2007Bibliographic Level Mode of Issuance: Monograph9781424406418 1424406412 Microelectromechanical systemsCongressesOptical MEMSCongressesNanophotonicsCongressesElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCElectrical EngineeringHILCCMicroelectromechanical systemsOptical MEMSNanophotonicsElectrical & Computer EngineeringEngineering & Applied SciencesElectrical Engineering621.36IEEE/LEOS International Conference on Optical MEMS and NanophotonicsPQKBPROCEEDING99101429953033212007 IEEE2346897UNINA