02570nam 2200577 a 450 991014146310332120180914181033.03-527-64713-91-299-15734-33-527-64712-0(CKB)2670000000328200(EBL)1120882(OCoLC)827207461(SSID)ssj0000884292(PQKBManifestationID)11471286(PQKBTitleCode)TC0000884292(PQKBWorkID)10940021(PQKB)10118380(MiAaPQ)EBC1120882(EXLCZ)99267000000032820020130225d2013 uy 0engur|n|---|||||txtccrSystem-level modeling of MEMS[electronic resource] /edited by Tamara Bechtold, Gabriele Schrag, and Lihong FengWeinheim Wiley-VCH20131 online resource (564 p.)Advanced Micro and NanosystemsAdvanced micro & nanosystemsDescription based upon print version of record.3-527-31903-4 Includes bibliographical references and index.pt. I. Physical and mathematical fundamentals -- pt. II. Lumped element modeling method for MEMS devices -- pt. III. Mathematical model order reduction for MEMS devices -- pt. IV. Modeling of entire microsystems -- pt. V. Software implementations.Filling a gap in the literature, this is the first handbook to simultaneously address the three most important approaches of system-level modeling: physical modeling with lumped elements and Kirchhoffian networks, modal modeling to accurately describe the mechanical domain, and mathematical modeling employing, for example, model order reduction methods. By adopting this approach, the top editors and authors from industry and research have created a book that will set the standard for years to come. Writing on a clearly understandable and sufficiently detailed level, they familiarize readerAdvanced micro & nanosystemsMicroelectromechanical systemsElectronic books.Microelectromechanical systems.500Bechtold T(Tamara)982684Schrag Gabriele982685Feng Lihong982686MiAaPQMiAaPQMiAaPQBOOK9910141463103321System-level modeling of MEMS2242621UNINA