01241oam 2200397zu 450 991014114530332120210807001402.04-9904138-3-0(CKB)2670000000083011(SSID)ssj0000669765(PQKBManifestationID)12276024(PQKBTitleCode)TC0000669765(PQKBWorkID)10709538(PQKB)10213256(NjHacI)992670000000083011(EXLCZ)99267000000008301120160829d2010 uy engur|||||||||||txtccr2010 International Symposium on Semiconductor Manufacturing[Place of publication not identified]IEEE20101 online resource (446 pages) illustrationsBibliographic Level Mode of Issuance: Monograph1-4577-0392-0 SemiconductorsDesign and constructionCongressesSemiconductorsDesign and construction621.38152IEEE StaffPQKBPROCEEDING99101411453033212010 International Symposium on Semiconductor Manufacturing2529485UNINA