01379oam 2200445zu 450 991014091370332120241212220037.09781424477005142447700X(CKB)2670000000054060(SSID)ssj0000452165(PQKBManifestationID)12182347(PQKBTitleCode)TC0000452165(PQKBWorkID)10468764(PQKB)10691434(NjHacI)992670000000054060(EXLCZ)99267000000005406020160829d2010 uy engur|||||||||||txtccr2010 International Conference on Simulation of Semiconductor Processes and Devices[Place of publication not identified]I E E E20101 online resource (xiv, 324 pages)Bibliographic Level Mode of Issuance: Monograph9781424477012 1424477018 Engineering designCongressesComputer-aided designCongressesEngineering designComputer-aided design620.0042IEEE StaffPQKBPROCEEDING99101409137033212010 International Conference on Simulation of Semiconductor Processes and Devices2499172UNINA