02598oas 2200925 a 450 991014083350332120251106213014.0(OCoLC)652357628(CONSER) 2012254626(CKB)2670000000033873(MiAaPQ)2032359(DE-599)ZDB2620864-7(EXLCZ)99267000000003387320100527a20109999 oy engur|||||||||||txtrdacontentcrdamediacrrdacarrierMicromachinesBasel, Switzerland MDPI[2010]-1 online resourceRefereed/Peer-reviewed2072-666X MicromachinesMicromachines (Basel)Microelectromechanical systemsPeriodicalsNanoelectromechanical systemsPeriodicalsMicrocontrollersPeriodicalsMicrorobotsPeriodicalsMicroactuatorsPeriodicalsNanotechnologyMicro-Electrical-Mechanical SystemsMechanical PhenomenaRoboticsMicroactuatorsfast(OCoLC)fst01019455Microcontrollersfast(OCoLC)fst01744800Microelectromechanical systemsfast(OCoLC)fst01019745Microrobotsfast(OCoLC)fst01762181Nanoelectromechanical systemsfast(OCoLC)fst01741807Periodical.Fulltext.Internet Resources.Periodicals.Periodicals.fastMicroelectromechanical systemsNanoelectromechanical systemsMicrocontrollersMicrorobotsMicroactuatorsNanotechnology.Micro-Electrical-Mechanical Systems.Mechanical Phenomena.Robotics.Microactuators.Microcontrollers.Microelectromechanical systems.Microrobots.Nanoelectromechanical systems.INTCHINTCHHEBISOCLCQCUVCUSOCLCFOCLCQLIPUABXFHNLMAU@OCLCOOCLCACASUMOCLCQJOURNAL9910140833503321Micromachines2292078UNINA