01198oam 2200421zu 450 991014081020332120241212220013.097814244651941424465192(CKB)2670000000038167(SSID)ssj0000452724(PQKBManifestationID)12129737(PQKBTitleCode)TC0000452724(PQKBWorkID)10472471(PQKB)11488321(NjHacI)992670000000038167(EXLCZ)99267000000003816720160829d2010 uy engur|||||||||||txtccr2010 21st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference[Place of publication not identified]I E E E20101 online resourceBibliographic Level Mode of Issuance: Monograph9781424465170 1424465176 Process controlCongressesProcess control658.562IEEE StaffPQKBPROCEEDING99101408102033212010 21st Annual IEEE2498930UNINA