01451oam 2200421zu 450 991014066090332120241212215941.097814244561611424456169(CKB)2670000000033716(SSID)ssj0001648939(PQKBManifestationID)16416361(PQKBTitleCode)TC0001648939(PQKBWorkID)14959503(PQKB)10203084(EXLCZ)99267000000003371620160829d2010 uy engtxtccrFifth International Conference on MEMS, NANO, and Smart Systems : Dubai, UAE, 28-30 December 2009[Place of publication not identified]Conference Publishing Services2010Bibliographic Level Mode of Issuance: Monograph9781424456154 1424456150 9780769539386 0769539386 Microelectromechanical systemsCongressesMicroelectromechanical systemsInternational Association of Computer Science and Information TechnologyAim Shams UniversityInternational Conference on MEMS, NANO, and Smart SystemsPQKBPROCEEDING9910140660903321Fifth International Conference on MEMS, NANO, and Smart Systems : Dubai, UAE, 28-30 December 20092361716UNINA