02701nam 2200649 450 991013940140332120170816112742.01-283-02489-697866130248930-470-64966-60-470-64967-410.1002/9780470649671(CKB)2480000000008340(EBL)661687(SSID)ssj0000455893(PQKBManifestationID)11294423(PQKBTitleCode)TC0000455893(PQKBWorkID)10419571(PQKB)11481189(MiAaPQ)EBC661687(CaBNVSL)mat05628438(IDAMS)0b0000648138cdb9(IEEE)5628438(CaSebORM)9781118102244(OCoLC)689995493(EXLCZ)99248000000000834020151221d2010 uy engur|n|---|||||txtccrPrinciples of microelectromechanical systems /Ki Bang Lee1st editionHoboken, New Jersey :WILEY/IEEE Press,c2011.[Piscataqay, New Jersey] :IEEE Xplore,[2010]1 online resource (681 p.)Description based upon print version of record.1-118-10224-X 0-470-46634-0 Includes bibliographical references and index.Microfabrication -- Statics -- Static behavior of microstructures -- Dynamics -- Fluid dynamics -- Electromagnetics -- Piezoelectric and thermal actuators -- Electrostatic and electromagnetic actuators -- Sensors. The building blocks of MEMS design through closed-form solutions Microelectromechanical Systems, or MEMS, is the technology of very small systems; it is found in everything from inkjet printers and cars to cell phones, digital cameras, and medical equipment. This book describes the principles of MEMS via a unified approach and closed-form solutions to micromechanical problems, which have been recently developed by the author and go beyond what is available in other texts. The closed-form solutions allow the reader to easily understand the linear and nonlinear behaviors of MEMS and theMicroelectromechanical systemsMicrotechnologyMicroelectromechanical systems.Microtechnology.621.381Lee Ki Bang961875Lee Ki Bang961875CaBNVSLCaBNVSLCaBNVSLBOOK9910139401403321Principles of microelectromechanical systems2180736UNINA