02482nam 2200481 450 991013769870332120231214145444.0953-51-4329-8(CKB)3230000000076902(iGPub)INOP0000191(oapen)https://directory.doabooks.org/handle/20.500.12854/58917(MiAaPQ)EBC30390170(Au-PeEL)EBL30390170(EXLCZ)99323000000007690220191224012 xx c0 0engurcn||||m|||atxtrdacontentcrdamediacrrdacarrierScanning electron microscopy / Viacheslav Kazmiruk1st ed.IntechOpen2012[Place of publication not identified] :IntechOpen,2012.©20121 online resource (848 pages)953-51-0092-0 Today, an individual would be hard-pressed to find any science field that does not employ methods and instruments based on the use of fine focused electron and ion beams. Well instrumented and supplemented with advanced methods and techniques, SEMs provide possibilities not only of surface imaging but quantitative measurement of object topologies, local electrophysical characteristics of semiconductor structures and performing elemental analysis. Moreover, a fine focused e-beam is widely used for the creation of micro and nanostructures. The book's approach covers both theoretical and practical issues related to scanning electron microscopy. The book has 41 chapters, divided into six sections: Instrumentation, Methodology, Biology, Medicine, Material Science, Nanostructured Materials for Electronic Industry, Thin Films, Membranes, Ceramic, Geoscience, and Mineralogy. Each chapter, written by different authors, is a complete work which presupposes that readers have some background knowledge on the subject.TECHNOLOGY & ENGINEERING / Electronics / OptoelectronicsbisacshPhysical SciencesEngineering and TechnologyOptoelectronicsPhysicsOptics and LasersTECHNOLOGY & ENGINEERING / Electronics / Optoelectronics.Kazmiruk Viacheslav1108857MiAaPQMiAaPQMiAaPQBOOK9910137698703321Scanning electron microscopy2633370UNINA