01644nas 2200517- 450 991013634720332120200906062704.72055-7434(OCoLC)958672518(CKB)3780000000053616(CONSER)--2016243469(MiAaPQ)2041946(DE-599)ZDB2860112-9(EXLCZ)99378000000005361620160919a20159999 o-- -engtxtrdacontentcrdamediacrrdacarrierMicrosystems & nanoengineering[London] :Nature Publishing Group1 online resourceRefereed/Peer-reviewedElectronic resource type: Journal.2096-1030 Microsystems and nanoengineeringMicrosyst NanoengMicroelectromechanical systemsPeriodicalsNanotechnologyPeriodicalsMicroelectromechanical systemsfast(OCoLC)fst01019745Nanotechnologyfast(OCoLC)fst01032639Micro-Electrical-Mechanical SystemsNanotechnologyPeriodicals.fastPeriodical.Microelectromechanical systemsNanotechnologyMicroelectromechanical systems.Nanotechnology.Micro-Electrical-Mechanical Systems.Nanotechnology.Zhongguo ke xue yuan.Dian zi xue yan jiu suo.JOURNAL9910136347203321Microsystems & nanoengineering2118984UNINA