02085nam 2200349 450 991013626850332120231206214109.00-7381-9997-410.1109/IEEESTD.2015.7407265(CKB)3710000000595632(NjHacI)993710000000595632(EXLCZ)99371000000059563220231206d2015 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrierIEC/IEEE 62659 Edition 1.0 2015-09 IEC/IEEE International Standard - nanomanufacturing -- large scale manufacturing for nanoelectronics /Institute of Electrical and Electronics EngineersPiscataway, New Jersey :IEEE,2015.1 online resource (16 pages)This International Standard provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way. This International Standard provides steps employed to facilitate the introduction of nanomaterials into the semiconductor manufacturing facilities. This sequence is described below under the areas of raw materials acquisition, materials processing, design, IC fabrication, testing, and end-use. These activities represent the major stages of the supply chain in semiconductor manufacturing facilities.IEC/IEEE 62659 Edition 1.0 2015-09NanomanufacturingNanomanufacturing.620.5NjHacINjHaclDOCUMENT9910136268503321IEC2574023UNINA