01127nam 2200373 450 991013617130332120221019141921.0953-51-6344-2953-51-1085-3(CKB)3780000000053893(NjHacI)993780000000053893(EXLCZ)99378000000005389320221019d2013 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrierAdvances in Micro/Nano Electromechanical Systems and Fabrication Technologies /edited by Kenichi TakahataRijeka, Croatia :InTech,2013.1 online resource (236 pages) illustrations some colorIncludes bibliographical references.Optical physicsManufacturing processesOptical physics.Manufacturing processes.670Takahata Kenichi NjHacINjHaclBOOK9910136171303321Advances in Micro1910055UNINA