01527nam 2200481 450 991013487750332120161213103920.01-118-71797-X(CKB)4330000000006896(MiAaPQ)EBC4721144(DLC) 2015032319(EXLCZ)99433000000000689620161104h20172017 uy 0engurcnu||||||||rdacontentrdamediardacarrierMeasurement technology for micro-nanometer devices /Wendong Zhang [and eight others]Singapore :Wiley :National Defense Industry Press,2017.©20171 online resource (344 pages)1-118-71798-8 1-118-71796-1 Includes bibliographical references at the end of each chapters and index.MicrotechnologyMeasurementNanotechnologyMeasurementMicroelectromechanical systemsTestingPhysical measurementsElectronic books.MicrotechnologyMeasurement.NanotechnologyMeasurement.Microelectromechanical systemsTesting.Physical measurements.681/.2Zhang WendongMiAaPQMiAaPQMiAaPQBOOK9910134877503321Measurement technology for micro-nanometer devices1972692UNINA01493nam 2200469 450 991083041760332120161213103920.01-118-71797-X(CKB)4330000000006896(MiAaPQ)EBC4721144(DLC) 2015032319(EXLCZ)99433000000000689620161104h20172017 uy 0engurcnu||||||||rdacontentrdamediardacarrierMeasurement technology for micro-nanometer devices /Wendong Zhang [and eight others]Singapore :Wiley :National Defense Industry Press,2017.©20171 online resource (344 pages)1-118-71798-8 1-118-71796-1 Includes bibliographical references at the end of each chapters and index.MicrotechnologyMeasurementNanotechnologyMeasurementMicroelectromechanical systemsTestingPhysical measurementsMicrotechnologyMeasurement.NanotechnologyMeasurement.Microelectromechanical systemsTesting.Physical measurements.681/.2Zhang WendongMiAaPQMiAaPQMiAaPQBOOK9910830417603321Measurement technology for micro-nanometer devices3916370UNINA