00738oam 2200217z- 450 99101332347033211-4799-0762-6(CKB)3390000000045204(EXLCZ)99339000000004520420220628c2013uuuu -u- -engMicro/Nanotechnologies and Electron Devices (EDM), 2013 14th International Conference of Young Specialists onIEEE1-4799-0763-4 1-4799-0761-8 2013 14th International Conference of Young Specialists on Micro/Nanotechnologies and Electron DevicesMicro/Nanotechnologies and Electron Devices PROCEEDING9910133234703321Micro764900UNINA